@conference{183751,
  author = {James Maslar and R Davis and Elizabeth Moore and Donald Burgess and D Kremer and S Ehrman},
  title = {In Situ Gas Phase Optical Measurements of Silane Decomposition in a Thermal Chemical Vapor Deposition Reactor},
  year = {2001},
  number = {2001-1},
  month = {2001-03-01},
  publisher = {Electrochemical Society, Meeting | 199th | | Electrochemical Society},
  language = {en},
}