@conference{183601,
  author = {R Davis and Elizabeth Moore and James Maslar and Donald Burgess and D Kremer and S Ehrman},
  title = {A Numerical/Experimental Investigation of Microcontamination in a Rotating Disk Chemical Vapor Deposition Reactor},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP},
  language = {en},
}