@conference{183456,
  author = {Kenneth Kreider and D Chen and D DeWitt and William Kimes and Benjamin Tsai},
  title = {Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP},
  language = {en},
}