@conference{183351, author = {John Small and David Bright}, title = {Comparison of High- and Low-Voltage X-Ray Mapping of an Electronic Device}, year = {2001}, number = {550}, month = {2001-02-01}, publisher = {Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP}, language = {en}, }