@conference{183181,
  author = {Kenneth Kreider and D DeWitt and Benjamin Tsai and Francis Lovas and David Allen},
  title = {RTP Calibration Wafer Using Thin-Film Thermocouples},
  year = {1998},
  number = {525},
  month = {1998-04-01},
  publisher = {Rapid and Thermal Processing VII Symposium},
  language = {en},
}