@conference{183011,
  author = {Mark Sobolewski},
  title = {Monitoring Ion Current and Ion Energy During Plasma Processing Using Radio-Frequency Current and Voltage Measurements},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {International Conference on the Characterization and Metrology for ULSI Technology 2000 | | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP},
  language = {en},
}