@conference{18286,
  author = {Bryan Barnes and Francois Goasmat and Martin Sohn and Hui Zhou and Richard Silver and Andras Vladar and Abraham Arceo},
  title = {Optical volumetric inspection of sub-20 nm patterned defects with wafer noise},
  year = {2014},
  number = {9050},
  month = {2014-04-02},
  publisher = {Proceedings of the SPIE, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2048231},
  language = {en},
}