@article{182396, author = {Dale Newbury and David Wollman and Kent Irwin and Gene Hilton and John Martinis}, title = {Lowering the Limit of Detection in High Spatial Resolution Electron Beam Microanalysis With the Microcalorimeter Energy Dispersive X-Ray Spectrometer}, year = {1999}, number = {78}, month = {1999-06-01}, publisher = {Ultramicroscopy}, doi = {https://doi.org/10.1016/S0304-3991(99)00028-5}, language = {en}, }