@conference{182251,
  author = {P Chi and E Handy and M Rao},
  title = {Effect of AIN Encapsulate in High-Temperature Annealing on Ion-Implanted SiC as Characterized by SIMS},
  year = {1999},
  month = {1999-09-01},
  publisher = {Secondary ion mass spectrometry : SIMS XII : proceedings of the Twelfth International Conference on Secondary Mass Spectrometry (SIMS XII), Brussels, BE},
  language = {en},
}