@conference{182151,
  author = {Kenneth Kreider and David Allen and D Chen and D DeWitt and Christopher Meyer and Benjamin Tsai},
  title = {Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools},
  year = {2001},
  number = {2001},
  month = {2001-09-01},
  publisher = {Advanced Thermal Processing of Semiconductors, International Conference | 9th | | IEEE},
  language = {en},
}