@article{182041,
  author = {Kenneth Kreider and David Allen and D Chen and D DeWitt and Christopher Meyer and Benjamin Tsai},
  title = {Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools},
  year = {2002},
  number = {1},
  month = {2002-05-01},
  publisher = {International Conference on the Electro Chemical Society},
  language = {en},
}