@article{181336,
  author = {Kristen and Mark Sobolewski},
  title = {Effect of Changing the Electrode Gap on the Spatial and Electrical Properties of O<sub>2</sub>/CF<sub>4</sub> Plasmas},
  year = {2003},
  number = {21},
  month = {2003-01-01},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}