@misc{18131, author = {Jack Stone and Balasubramanian Muralikrishnan and Chittaranjan}, title = {Geometric effects when measuring small holes with micro contact probes.}, year = {2011}, number = {116}, month = {2011-03-01}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }