@conference{181261, author = {James Maslar and Wilbur Hurst}, title = {In Situ Optical Diagnostics of Silicon Chemical Vapor Deposition Gas-Phase Processes}, year = {2003}, number = {683}, month = {2003-09-01}, publisher = {Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP}, language = {en}, }