@conference{181221,
  author = {Mark Sobolewski},
  title = {Monitoring Sheath Voltages and Ion Energies in High-Density Plasmas Using Noninvasive Radio-Frequency Current and Voltage Measurements},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {International Conference on Characterization and Metrology for ULSI Technology | 2003 | Characterization and Metrology for ULSI Technology:  2003 International Conference on characterization and Metrology for ULSI Technology},
  language = {en},
}