@conference{181111,
  author = {Kristen and Mark Sobolewski},
  title = {Investigation and Control of Spatial Characteristics of Chamber-Cleaning Plasmas},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {Characterization and Metrology for ULSI Technology | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP},
  language = {en},
}