@article{181046,
  author = {Gregory Scace and Joseph Hodges},
  title = {Calibrating Water Permeation Tubes Using Saturator-Based Primary Trace Humidity Standards},
  year = {2003},
  month = {2003-05-01},
  publisher = {Proceedings of Semicon West 2003 Technology Symposium},
  language = {en},
}