@article{180886,
  author = {Mark Sobolewski and James Olthoff and Yicheng Wang},
  title = {Ion Energy Distributions and Sheath Voltages in Radio-Frequency-Biased, Inductively-Coupled, High-Density Plasma Reactor},
  year = {1999},
  number = {85},
  month = {1999-04-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}