@conference{180871,
  author = {Kenneth Kreider and William Kimes and Christopher Meyer and Dean Ripple and Benjamin Tsai and D Chen and D DeWitt},
  title = {Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples},
  year = {2003},
  month = {2003-10-01},
  publisher = {Eighth International Temperature Symposium | 8th | Temperature Its Measurement and Control in Science and Industry, Volume Seven | AIP},
  language = {en},
}