@article{18081,
  author = {Balasubramanian Muralikrishnan and Jack Stone and John Stoup},
  title = {Fiber Deflection Probe for Small Hole Metrology},
  year = {2006},
  number = {30},
  month = {2006-01-01},
  publisher = {J. International Societies for Precision Engineering and Nanotechnology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822250},
  language = {en},
}