@conference{180716, author = {Jay Hendricks and M Aquino-Class and Michael Zachariah}, title = {Thin Film Growth of Titanium and Titanium Nitride Via Gas-Phase Reaction of Sodium Vapor With Titanium Tetrachloride}, year = {1998}, number = {MA 98-2}, month = {1998-11-01}, publisher = {The 19th Proceedings of the Electrochemical Society}, language = {en}, }