@misc{180421,
  author = {Kenneth Kreider and D DeWitt and Benjamin Tsai and B Lojek},
  title = {Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples},
  year = {2001},
  month = {2001-01-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}