@article{18041, author = {Balasubramanian Muralikrishnan and Jack Stone and John Stoup and Chittaranjan Sahay}, title = {Micro-feature dimensional and form measurements with the NIST fiber probe on a CMM}, year = {2010}, month = {2010-07-30}, publisher = {Cal Lab: International Journal of Metrology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903944}, language = {en}, }