@misc{180216,
  author = {Dale Newbury},
  title = {Barriers to Quantitative Electron Probe X-Ray Microanalysis for Low Voltage Scanning Electron Microscopy},
  year = {2002},
  number = {107 No. 6},
  month = {2002-12-01},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}