@conference{180206,
  author = {P Chi and David Simons and J McKinley and F Stevie and C Granger},
  title = {High Precision Measurements of Arsenic Implantation Dose in Silicon by Secondary Ion Mass Spectrometry},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {Characterization and Metrology for ULSI Technology, International Conference | | Characterizatoin and Metrology for ULSI Technology 2000 | AIP},
  language = {en},
}