@article{178316,
  author = {Thomas Germer and Li Sung},
  title = {Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silcon Wafers},
  year = {1999},
  number = {4},
  month = {1999-07-01},
  publisher = {Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Application},
  language = {en},
}