@misc{178291,
  author = {C Russell and S Owens and R Deslattes and A Diebold},
  title = {An Examination of Tantalum Pentoxide Thin Dielectric Films Using Grazing Incidence X-Ray Reflectivity and Powder Diffraction},
  year = {2001},
  number = {550},
  month = {2001-01-01},
  publisher = {Electronic Publication},
  language = {en},
}