@conference{178281,
  author = {Charles Tarrio and Robert Vest and S Grantham},
  title = {Absolute Extreme Ultraviolet Metrology},
  year = {2001},
  number = {4450},
  month = {2001-08-01},
  publisher = {Harnessing Light: Optical Science and Metrology at NIST},
  language = {en},
}