@article{178076,
  author = {Zachary Levine and S Grantham and S Neogi and S Frigo and I McNulty and C Retsch and Y Wang and Thomas Lucatorto},
  title = {Accurate Pattern Registration for Integrated Circuit Tomography},
  year = {2001},
  number = {90},
  month = {2001-07-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}