@misc{177881, author = {Charles Tarrio and S Grantham and M Squires and Robert Vest and Thomas Lucatorto}, title = {Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography}, year = {2003}, number = {108 No. 4}, month = {2003-07-01}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }