@article{177626, author = {A. Mahan and Y Xu and B Nelson and R Crandall and J Cohen and K Palinginis and Alan Gallagher}, title = {Saturated Defect Densities of Hydrogenated Amorphous Silicon Grown by Hot-Wire Chemical Vapor Deposition at Rates up to 150 /S}, year = {2001}, number = {78}, month = {2001-06-01}, publisher = {Applied Physics Letters}, language = {en}, }