@conference{177336,
  author = {B Yan and J Yang and S Guha and Alan Gallagher},
  title = {Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge},
  year = {2000},
  number = {557},
  month = {2000-06-01},
  publisher = {Amorphous and Heterogeneous Silicon Thin Films-Fundamentals to Devices, Symposium A | | Amorphous and Heterogeneous Silicon Thin Films--1999 | Materials Research Society},
  language = {en},
}