@article{176286,
  author = {Zachary Levine and Steven Grantham and D Paterson and I McNulty and I Noyan and T Levin},
  title = {Imaging Material Components of an Integrated Circuit Interconnect},
  year = {2004},
  number = {95},
  month = {2004-01-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}