@article{176281,
  author = {Charles Tarrio and S Grantham and Thomas Lucatorto},
  title = {Facility for Extreme Ultraviolet Reflectometry of Lithography Optics},
  year = {2003},
  number = {40},
  month = {2003-02-01},
  publisher = {Metrologia},
  language = {en},
}