@article{175671,
  author = {Eric Benck and G Golubiatnikow and Gerald Fraser and B Ji and S Motika and E Karwacki},
  title = {Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing},
  year = {2003},
  number = {21},
  month = {2003-09-01},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}