@article{175331,
  author = {John Burnett and Zachary Levine and Eric Shirley},
  title = {Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography},
  year = {2001},
  number = {15},
  month = {2001-12-01},
  publisher = {Semiconductors},
  language = {en},
}