@conference{174911,
  author = {Thomas Germer},
  title = {Characterizing Interfacial Roughness by Light Scattering Ellipsometry},
  year = {2001},
  number = {550},
  month = {2001-06-01},
  publisher = {Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP},
  language = {en},
}