@article{174851,
  author = {Zachary Levine and J Gao and S Neogi and T Levin and J Scott and Steven Grantham},
  title = {Parallax Measurements of Integrated Circuit Interconnects Using a Scanning Transmission Electron Microscope},
  year = {2003},
  number = {93},
  month = {2003-02-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}