@article{174631,
  author = {A Schwabedissen and Eric Benck and J Roberts},
  title = {Comparison of Electron Density Measurements in Planar Inductively Coupled Plasmas by Means of the Plasma Oscillation Method and Lanqmuir Probes},
  year = {1998},
  number = {7},
  month = {1998-01-01},
  publisher = {Plasma Sources Science & Technology},
  language = {en},
}