@conference{173636,
  author = {Benjamin Tsai and J Bodycomb and D DeWitt and Kenneth Kreider and William Kimes},
  title = {Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed},
  year = {2004},
  month = {2004-09-01},
  publisher = {IEEE International Conference on Advanced Thermal Processing of Semiconductors |12th | | IEEE},
  language = {en},
}