@conference{171306,
  author = {Thomas Germer and George Mulholland and Jae and S Ehrman},
  title = {Measurement of the 100 nm NIST SRM 1963 by Laser Surface Light Scattering},
  year = {2002},
  number = {4779},
  month = {2002-11-01},
  publisher = {Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components},
  language = {en},
}