@misc{170396,
  author = {Sangcheol Kim and A Sehgal and Alamgir Karim and Michael Fasolka},
  title = {Techniques for Combinatorial and High-Throughput Microscopy, Part 2: Automated Optical Microscopy Platform for Thin Film Research},
  year = {2003},
  month = {2003-01-01},
  publisher = {Techniques for Combinatorial and High-Throughput Microscopy, Part 2: Automated Optical Microscopy Platform for Thin Film Research},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853897},
  language = {en},
}