@article{170231, author = {Wen-Li Wu and Eric Lin and Christopher Soles}, title = {Structure Characterization of Porous Interlevel Dielectric Films}, year = {2004}, number = {17}, month = {2004-06-21}, publisher = {Future Fab International}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852387}, language = {en}, }