@article{170131,
  author = {R Hedden and C Waldfried and H Lee and O Escorcia},
  title = {Comparison of Curing Processes for Porous Dielectrics Measurements From Specular X-ray Reflectivity},
  year = {2004},
  number = {151(8)},
  month = {2004-01-01},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852140},
  language = {en},
}