@conference{170126,
  author = {M Silverstein and Barry Bauer and V. Lee and R Hedden and B Landes and J Lyons and B Kern and J Niu and T Kalantar},
  title = {The Structural Evolution of Pore Formation in Low-K Dielectric Thin Films},
  year = {2003},
  number = {25(1)},
  month = {2003-01-01},
  publisher = {ULSI Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852139},
  language = {en},
}