@conference{169916,
  author = {Chad Snyder},
  title = {High Sensitivity Technique for Measurement of Thin Film Out-of-Plane Expansion. II. Conducting and Semiconducting Samples},
  year = {2001},
  number = {550},
  month = {2001-01-01},
  publisher = {Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology,  Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851726},
  language = {en},
}