@conference{169881,
  author = {Wen-Li Wu and Eric Lin and C Jin and J Wetzel},
  title = {A Three-Phase Model for the Structure of Porous Thin Films Determined by X-Ray Reflectivity and Small Angle Neutron Scattering},
  year = {2000},
  number = {612},
  month = {2000-04-01},
  publisher = {Materials, Technology, and Reliability for Advanced Interconnects and Low-K Dielectrics, Symposium  |  | Materials, Technology, and Reliability for Advanced Interconnects and Low-K Dielectrics | Materials Research Society,  San Francisco, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851720},
  language = {en},
}