@conference{169811,
  author = {Eric Lin and Sushil Satija and Wen-Li Wu and Christopher Soles and D Goldfarb and B Trinque and S Burns and Ronald Jones and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and M Angelopoulos and C Willson},
  title = {Measurement of the Spatial Evolution of the Deprotection Reaction Front With Nanometer Resolution Using Neutron Reflectometry},
  year = {2002},
  number = {4690},
  month = {2002-12-01},
  publisher = {Advances in Resist Processing and Technology, Conference | 19th | Advances in Resist Processing and Technology XIX | SPIE, CA, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852040},
  language = {en},
}