@article{169771,
  author = {M Silverstein and Michael Shach-Caplan and Barry Bauer and R Hedden and V. Lee and B Landes},
  title = {Nanopore Formation in a Polyphenylene Low-k Dielectric},
  year = {2005},
  number = {38},
  month = {2005-04-01},
  publisher = {Macromolecules},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852467},
  language = {en},
}