@conference{169681,
  author = {Eric Lin and Wen-Li Wu and C Jin and J Wetzel},
  title = {Structure and Property Characterization of Porous Low-k Dielectric Constant Thin Films Using X-ray Reflectivity and Small Angle Neutron Scattering},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {| | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP,  San Francisco, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851750},
  language = {en},
}